Developments to Improve Process Stability on the New MA200 Gen3

Scrap rate, rework rate and consequentially yield are decisive parameters for the cost of production processes. To achieve the constant reduction of production cost which is needed to stay competitive in semiconductor manufacturing, yield improvements are an important factor. Besides the improve- ments of the production processes themselves, ongoing development of the production tools support the efforts to bring down the cost of goods sold. Especially in the back end of line yield loss is painful, since source material is very costly. Improving the process stability and avoiding any wafer scrap are therefore desirable goals of any machine development.