Projection Scanner

Noted for its highly accurate alignment and precise exposure optics, SUSS’s product portfolio of proximity printing equipment is complemented by a unique projection lithography solution. The projection scanner platform DSC combines the advantages of full-field lithography with the imaging performance of projection lithography, offering a very cost-efficient alternative to projection steppers. Equipped with a full-field mask and broadband projection optics, the system exposes the substrate in a single continuous scanning mode.

The projection scanner platform is suited for applications such as advanced packaging, especially wafer-level chip-scale packaging and flip-chip packaging, 3D integration, MEMS and displays.