The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with seventy years of engineering experience.

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components.

The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like Advanced Packaging, MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.

Product Portfolio

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components.

SUSS MicroTec Product Portfolio


Managing Board

Portrait of Goetz Bendele

GOETZ M. Bendele

Chief Executive Officer (CEO)

Goetz M. Bendele (born 1970, German citizen) received his Ph.D. in physics from Stone Brook University, NY (USA) in 1998. He then worked for one year as a Post-Doctoral Researcher (physics) at Los Alamos National Laboratory, Los Alamos, NM (USA). In 2000, he joined McKinsey & Company as a management consultant. There he worked in Berlin, Hamburg, Palo Alto, CA (USA) and Taipei (Taiwan) from 2000 to 2009. Before his appointment as CEO of LPKF Laser & Electronics AG from 2018 to 2021, he held various management positions. Goetz M. Bendele was a partner at Infosys Limited in Seattle (USA), where he was responsible for the consulting business of technology companies on the US West Coast. Prior to that, he was Managing Director of the European solar business of chip manufacturer TSMC. Goetz M. Bendele holds a doctorate in physics and, in addition to extensive sales and management experience, has extensive knowledge in the fields of technology, product innovation, and product development. He has many years of experience in the semiconductor, electronics and solar industries, complemented by almost ten years of consulting experience for high-tech companies in Europe, the USA and Asia as a management consultant at McKinsey & Company. He is not a member of statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Status April 2021

Portrait of Oliver Albrecht

Oliver Albrecht

Chief Financial Officer (CFO)

Oliver Albrecht (born 1964, German citizen) is CFO of SUSS MicroTec SE since November 18, 2019. He studied business administration at the University of Mannheim and at the Institut Commercial de Nancy after an apprenticeship as a banker. 1992 to 2003, he worked in the finance and banking sector as Director of Investment Banking and Corporate Finance. Between 2003 and 2019, he held various commercial positions at executive level: Head of Finance at Peri GmbH in Weißenhorn, Chief Financial Officer at centrotherm photovoltaics AG in Blaubeuren, Chief Financial Officer at SHW AG in Aalen, Managing Director of Vetter Pharma-Fertigung GmbH & Co KG in Ravensburg. He is not a member of statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Status April 2021

Portrait of Thomas Rohe

Thomas Rohe

Chief Operating Officer (COO)

Before his Ph.D. as Dr. Ing. at the University of Stuttgart in 2001, Thomas Rohe (born 1966, German citizen) studied Physics at the Technical University of Darmstadt. In 2009 and 2010 he completed an MBA course at the Universities of Augsburg and Pittsburgh (USA). Thomas Rohe began his professional career in 1994 at the Fraunhofer Institute ICT. In 2001, he joined the industry at Carl Zeiss SMT GmbH, where he was initially responsible for the development of wafer scanner optics as a product manager. In 2005, he became head of the LIT-TM Technology Mechatronics department. From 2007 to 2014, he also worked for companies of the Carl Zeiss Group as Business Unit Manager and, most recently, as Senior Director of Operations in the Electron Microscopy Business Unit. He then assumed the position of Executive Board member and COO of Prueftechnik Dieter Busch AG, which was sold to the American Fortive Group and its subsidiary Fluke, respectively, in July 2019. Thomas Rohe has a high level of understanding of technology and manufacturing, as well as relevant industry experience. He is not a member of statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Status April 2021

Supervisory Board


Dr. David Dean

Chairman of the Supervisory Board*

For more than 30 years, Dr. Dean has successfully worked at the executive level with global technology companies on their strategy and business development. After Masters and Doctoral degrees in physics and theoretical nuclear physics he started his career in academia before moving to the Boston Consulting Group in 1985. Between 1994 and 2013, Dr. Dean was a partner (from 2002 as Senior Partner) in the Technology & Telecoms practice of The Boston Consulting Group and held worldwide responsibility for this business between 2000 and 2006. Today, he shares his experience as an independent consultant and as a member of supervisory or advisory board of companies:

Senior Advisor to the Boston Consulting Group, Munich, Germany
Kaiteki Institute of Mitsubishi Chemical Holding Corp, Tokyo, Japan
PT XL Axiata Tbk, Jakarta, Indonesia
Axiata Group Berhad, Kuala Lumpur, Malaysia
Ncell Pvt Ltd, Kathmandu, Nepal

Chairman of Supervisory Board since May 20, 2020. Elected until 2022. Status April 2021

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Dr. Myriam Jahn

Vice Chairman of Supervisory Board*

Dr. Jahn started her professional career as a consultant at the Boston Consulting Group in Duesseldorf. Later on she joined the Deutsche Gesellschaft für Mittelstandsberatung (DGM), where she specialized in strategy consulting. After her dissertation and PhD at the University of Duisburg-Essen in 2003, she moved on to the ifm-group in Essen. There, she held various responsible positions in sales and administration. From 2016 to 2018, Ms. Dr. Jahn has been a member of the Management Board of TiSC AG, a subsidiary of the ifm-group, there she was responsible for sales. Since September 2019, she is member of the executive board of QSC AG. In the supervisory board of SUSS MicroTec, Dr. Jahn is responsible for the competence areas of digitalization as well as industry 4.0 (smart factory). With her long-standing experience in these areas, she complements the existing core competences of the supervisory board with two important, up-to-date topics.

Since May 2017. Elected until 2022. Status April 2021

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Dr. Dietmar Meister

Member of the Supervisory Board*

Dietmar Meister started his professional career at Daimler-Benz AG, where he held various positions. In 1997 he joined Jungheinrich AG where he was Vice President Group Controlling until 2000. He then became Member of the Board / CFO of the Refrigeration Division in the Linde Group. From 2006 to 2009, he managed finances of the Brose group as its CFO. As CFO of the Vaillant Group, he was responsible for finances and services from 2009 to 2017. Since 2019, he has been working as an independent board advisory and consultant.
Dr. Dietmar Meister holds a PhD in Economics and is a member of the Regional Advisory Committee West at Commerzbank.

Since June 2019. Elected until 2022. Status April 2021

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Jan Smits

Member of the Supervisory Board*

Jan Smits has held various management positions in established technology companies in the semi-conductor industry, most recently at ASML Holding in the Netherlands where he worked for a total of around 22 years. From 2016 until 2019 he was Executive Vice President of Strategic Sourcing & Procurement. Until 2019, Mr. Smits held the positions of Director of ASML Netherlands and Member of the Executive Committee of ASML Holding in addition to heading the Strategic Purchasing Divi-sion. Prior to that, Mr. Smits was Head of the Lithography Business Unit "Deep UV" at ASML. From 1983 – 1997 Jan Smits worked at Philips Electronics responsible for planning and construction of various development and production sites, most recently as Program Director Equipment and Infra-structure MOS4 of Philips Semiconductor Inc. Jan Smits holds a master degree as mechanical engineer at the Technical Univerisity Einhoeven, Netherlands.

Member of Supervisory Board since May 20, 2020. Elected until 2022. Status April 2021

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Dr. Bernd Schulte

Member of the Supervisory Board*

Dr. Bernd Schulte has been a member of the Management Board of AIXTRON SE in Herzogenrath since 2002. Since 2017 he is responsible for the areas of research and development, procurement, investor relations and communication, corporate governance, environment, social and governance as well as compliance and risk management. He started his academic career by studying physics at the Technical University of Darmstadt in 1883, where he graduated in 1989. In 1993, he received his PhD in Physics at the Technical University of Darmstadt. Before moving to AIXTRON, he worked as a re-search assistant for Hoechst AG in the early 1990s. His professional positions at AIXTRON include, for example, project and product management for the Asia-Pacific region and a management position in the compound semiconductor equipment division. From 2002 to 2017, Dr. Schulte worked as COO in the company's Management Board.

Since November 6, 2020. Appointed until ordinary annual general meeting 2021. Status April 2021

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Financial Figures

  in € million 2020 2019 2018 2017 2016
 Business Development           
  Order entry 281.1 219.3 191.0 200.3 161.1
  Order backlog as of December 31 120.1 93.2 84.7 133.4 101.5
  Total Sales 252.1 213.8 203.9 166.5 177.6
  Gross profit 83.7 49.7 67.3 59.5 58.6
  Gross margin 33.2 % 23.2 % 33.0 % 35.7% 33.0%
  Gross profit – adjusted for extraordinary effects 83.8 63.9 67.3    
  Gross margin – adjusted for extraordinary effects 33.2 % 29.9 % 33.0 %    
  Cost of sales 168.4 164.1 136.7 107.0 119.0
  Cost of sales – adjusted for extraordinary effects 168.3 149.9 136.7 9.7 %  
  Research and Development costs 19.8 20.2 18.3 15.2 14.1
  EBITDA 28.2 -5.2 15.7 18.0 15.3
  EBITDA margin 11.2 % -2.4 % 7.7 % 10.8% 8.6%
  EBIT 20.4 -13.8 10.9 13.9 11.1
  EBIT margin 8.1 % -6.5 % 5.3 % 8.3% 6.3%
  EBIT – adjusted for extraordinary effects 23.0 0.5 10.9    
  EBIT margin – adjusted for extraordinary effects 9.1 % 0.2 % 5.3 %    
  Earnings after tax 12.4 -16.3 4.8 6.7 5.0
  Earnings per share, basic (in €) 0.65 -0.85 0.25 0.35 0.26
Extraordinary effects          
  Reversals/special write-downs on assets -2.1 14.2 - - -
  Closure costs included in the cost of sales 2.2 0.0 - - -
Balance Sheet and cash flow           
  Equity 136.5 125.4 140.4 127.0 124.4
  Equity ratio 59.0 % 62.7 % 70.3 % 62.9% 69.2%
  Return on equity 9.1 % -13.0 % 3.4 % 5.3% 4.0%
  Balance sheet total 231.4 199.9 199.6 202.0 179.6
  Net cash 20.3 -18.0 28.2 33.0 31.1
  Free cash flow 44.0 -36.9 -5.0 2.9 -9.1
 Further key figures           
  Investments 11.3 6.1 6.9 6.5 3.6
  Investment ratio 4.5 % 2.9 % 3.4 % 3.9% 2.0%
  Depreciation 7.8 8.6 4.8 4.1 4.2
  Employees as of December 31 1,009 937 881 779 711


SUSS MicroTec SE and its subsidiaries form an international corporation that manufactures and sells products in the field of microsystems technology and microelectronics. Production is concentrated at facilities in Garching and Sternenfels in Germany and in Neuchâtel in Switzerland.

The products are distributed through the production sites as well as through independent distributors in the USA, The Netherlands, France, United Kingdom, Japan, Singapore, Taiwan, China, and Korea.

In countries in which SUSS MicroTec has no subsidiaries, our international presence is supported by a network of SUSS representatives.

Production Sites

Garching | Germany

SUSS MicroTec Headquarters in Garching, Germany

The headquarters of SUSS MicroTec is located in Garching, a university city in the northern part of the district of Munich. SUSS MicroTec benefits from ideal infrastructure with an international airport close by, as well as direct access to the A9 motorway and excellent rail connections. In addition to the company headquarters, the development and production facilities of SUSS Mask Aligners, alignment and exposure equipment for lithographic applications, are also located in Garching.

Sternenfels | Germany

SUSS MicroTec building in Sternenfels, Germany

SUSS MicroTec’s largest production facility in Sternenfels accommodates three product lines, Coater/Developer, Wafer Bonder, and Photomask Equipment under one roof. The Sternenfels premises, in the prosperous and scenic region between Karlsruhe and Stuttgart, meet the latest demands for development, production, and management structures.

Neuchâtel | Switzerland

SMO Building in Neuchâtel

In Hauterive (Neuchatel) subsidiary SUSS MicroOptics is manufacturing SUSS MicroTec’s special optics and other optical elements. Its proximity to the renowned watch and microtechnology industry as well as Swiss research institutes offers a significant advantage of location.

Hsinchu | Taiwan

SUSS MicroTec Taiwan Facility Hsinchu/Taiwan

The SUSS MicroTec facility in Taiwan consists of an office and a production area. It is located in the state-funded Science Park in Hsinchu, one of the world's most important centers for semiconductor manufacturing as well as industrial and computer technology development. The facility covers an area of 4,800 square meters, of which 2,900 square meters consist of a cleanroom area, including storage. The primary activity will be the production and delivery of the majority of SUSS ACS200 and ACS300 coaters/developers. In addition, UV projection scanner systems are designed and manufactured at this site.


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