Quality Management

The leading position of SUSS MicroTec with its production divisions for lithography systems, photomask equipment, substrate bonder and microoptics is built on our strong commitment to quality.
Our quality goals are founded on sustainable customer trust, customer value, cooperative partnerships and most of all motivated employees. We focus on delivering high quality products, services and innovative solutions.

Sustainable Customer Trust

We work with the utmost integrity and strive to be open and credible in our communication with customers. We believe that it is our part of the customers´ success to be a reliable source, constantly committed to deliver products and services that meet our customers expectations.

Cooperative Supplier Partnership

We invent and develop processes, products and services to facilitate the success of our customers. Our long-term, cooperative supplier partnerships ensure that products are on-time and delivered to meet customer specifications with the highest quality available.

Motivated Personnel

We promote the growth and development of each employee. It is our believe that each person is a source of quality having clear defined responsibilities for technological developments, production and business processes.

High Quality Product Service

We guarantee that our products and services will meet or exceed the quality expectations of our customers. We utilize industry experts, the latest technology, continuous quality control and improvement processes to achieve world-class results.

Approved Quality

All MicroTec divisions share our strong commitment to quality. Processes are based on effective quality management, subject to continuous improvement programs and have been certified pursuant to ISO 9001.
Suppliers are selected according to pre-determined criteria and are requested to maintain the highest level of quality.
Our development follows stringent concepts, based on customer expectations, international standards and our own rich experiences. Each stage of development is subjected to relevant quality measurements and feedback controls.

Our production operates according to standardized specifications. With the use of the kanban system and sophisticated modular concepts our supply of materials is subject to minimum cycle times on the highest quality.

ISO Certificates

The SUSS MicroTec group currently holds following certificates
SÜSS MicroTec SE
SUSS MicroTec Lithography GmbH
(Garching & Sternenfels)
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Aligner, Bonder, Coater
Photomask Equipment
SUSS MicroOptics SA Micro Optical Devices SQS Certification
SUSS MicroOptics SA Micro Optical Devices SQS Certification

Environmental Responsibility

How we use natural resources and our impact on the environment have become the most urgent questions of our age. At SUSS MicroTec, we face these questions as part of our social responsibility as a company. With our certified environmental management system, we implement the standards of ISO 14001. In the Environmental Policy of SUSS MicroTec, we have defined, as internal company objectives, conservation of resources, responsible handling of hazardous substances, controlled waste management, and reduced production of emissions, as well as the sustainability of the products.

Refurbishment instead of scrapping

Sophisticated design, careful assembly, and the use of high-quality components pay off. The service life of 15 years or longer for our systems and equipment is not uncommon and provides proof of an excellent return on investment. Our systems’ durability often means the equipment is used by more than one customer. The subsidiary SUSS MicroTec ReMan buys back used SUSS systems and refurbishes them, treating the units to an extensive, general overhaul and then returning them to market. This provides used equipment with longer service life and helps save valuable resources.

LEDs as new exposure systems

With the development of an environmentally-friendly LED lamp housing design for the mask aligner platforms, the company has taken an important step toward making its products more energy-efficient and environmentally friendly. The life of a UV LED light source is several times higher than that of the conventional mercury vapor lamp. The energy-intensive temperature control phases of the lamp also drop during operation – the LED only has to be switched on when exposure is actually carried out. Both factors have a significant impact on energy consumption. They enable energy savings of up to 75%, depending on the respective processing step and the process environment. In addition, the LED lamphouse is a clean solution with regard to occupational health and safety. It is no longer necessary to work with the hazardous substance mercury or dispose of it as hazardous waste.

Handling chemicals with care

Chemical substances play a particularly large role in our coater/developer platforms. We have therefore focused our development activities for the product line on using as few wet chemicals as possible. Internal recycling systems for the development platforms AD12 and SD12 re-introduce media to the process cycle and thus ensure reduced consumption.

Wet chemicals are used not only by customers but also by SUSS MicroTec in application testing for customer processes or tests for development activities. SUSS MicroTec is committed to replacing wet chemicals with simple wet media such as distilled water, alcohol, or acetone. Our efforts are also focused on the disposal of chemicals. In the Garching application lab, where tests on SUSS MicroTec's coating equipment are conducted, a neutralization unit for handling discharge water keeps the pH value of the different chemicals at an environmentally friendly level. With alternative technologies such as laser ablation, the company offers its customers the option of widely avoiding the use of chemicals.

Energy balance in the company

To save resources and reduce emissions of greenhouse gases, efficient energy management is critical. Through regular analysis of data and processes, SUSS MicroTec forms a clear image of its current energy balance and can thus selectively initiate improvements. Various measures have increased energy efficiency at our sites in Garching, Sternenfels and Oberschleißheim in Germany, and Hauterive in Switzerland. The conversion to a state-of-the-art heating and air conditioning system in the clean rooms has also resulted in a considerable improvement of the energy balance. We have reduced power consumption at our sites through efficient lighting systems. At the Garching site, specifically, the switch to an in-house CHP plant led to reduced power consumption and thus reduced CO2 emissions by approx. 7%.


Technological Leadership with Responsibility

Sustainability has a very high priority at SUSS MicroTec. As a technology leader and driver of innovation, we consider ourselves committed not only to first-class products but also to sustainability. In our management decisions, it is always necessary to bring the social, ecological, and economic aspects into harmony. We always strive for a fair and socially responsible interaction with customers, employees, and competitors. In addition, we also apply the same high standards to our suppliers and business partners.


Quality Management Representative
Karl-Heinz Bräuner
Tel: +49 7045 41-337
Fax: +49 7045 41-101