MaskTrack Smart BD

MaskTrack Smart BD fulfils the requirements of the next-generation lithography roadmap for bake and develop of photomasks. The new Bake and Develop flagship represents an evolution of the widely recognized and successful MaskTrack Pro BD. Constructed to satisfy all the requirements of today's lithography using cutting-edge methods to enhance mask performance.
Developed to cover all aspects of mask production needed in today’s Bake and Develop sector, MaskTrack Smart BD addresses the growing significance of mask integrity for the effectiveness of advanced lithographic processes. It is extensible and allows for the clustering of tools with third-party products, facilitating a comprehensive approach to mask storage, handling, and processing within a fully controlled and extremely clean environment. The modular platform ensures the highest degree of flexibility and customization. With world-class results in Bake and Develop, the MaskTrack Series has established itself as the platform of choice in the industry.