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Spin Coaters / Spray Coaters

Meeting Your Needs with Comprehensive Coating/Developing Solutions

SUSS Spin Coaters / Spray Coaters have become synonymous with premium performance, ease of use, flexibility and enhanced coating mastery. With a complete line of compact and user-friendly spin coater / spray coater equipment from economic low-volume laboratory tools to high-end production coating up to 300mm SUSS MicroTec is the preferred choice for many microlithography process applications. SUSS Spin Coaters include the SUSS patented GYRSET system, a technique designed for solvent rich, low turbulence coating, that allows for minimal consumption of material. The newly launched Gamma XPress advanced coating cluster is targeting wafer bumping as well as LED manufacturing applications and is based on standardized production set-ups. Budgetary quotes for each of these configurations can be requested online. The SUSS proprietary developed AltaSpray Coating Technology uses a revolutionary resist deposition method that is mainly used for the fabrication of 3-D microstructures. AltaSpray enables conformal coatings across flat and steeply sloped surfaces, covering topography steps up to 600 microns and more.

Fab-automated Coating Cluster

Production Spin Coater / Spray Coater

Manual Spin & Spray Coaters