Ownership of Shares and Subscription Rights

As of the end of the fiscal year on December 31, 2007, the members of the Management and Supervisory Board of SUSS MicroTec AG own the following number of shares and subscription rights:

Supervisory Board Number of shares on 12/31/2007 Change from 12/31/2006 Number of options on 12/31/2007 Change from 12/31/2006
Dr. Winfried Süss 1,131,0000 - 0 -
Gerhard Rauter 0 - 0 -
Dr. h.c. Horst Görtza 17,216 - 0 -
Peter Heinz, MBA 1,338 - 0 -
Prof. Dr. Anton Heuberger 0 - 0 -
Dr. Christoph Schückingb 500 - 0 -
Dr. Stefan Reineckc 1,600 + 1,600 40,000 + 40,000
Heinz-Peter Verspayd 0 - 0 -
Management Board  
Dr. Stefan Schneidewind 18,278 + 5,000 150,000 +70,000
Michael Knoppe 5,000 + 5,000 30,000 +30,000
Dr. Stefan Reineckf 1,600 + 1,600 40,000 +40,000
Stefan Schulakg 0 - 25,000 0 -

a Member of the Supervisory Board until September 30, 2007

b Member of the Supervisory Board until July 6, 2007

c Member of the Supervisory Board since Oktober 1, 2007

d Member of the Supervisory Board since July 6, 2007

e Member of the Management Board since August 1, 2007

f Member of the Management Board until September 30, 2007

g Member of the Management Board until March 31, 2007