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Wet Processing
Advanced Wet Processing Solutions to Support Your R&D and Manufacturing Operations
SUSS MicroTec offers offers a variety of wet processes for aqueous or solvent based chemistry. With a broad range of dispense systems like puddle or stream dispense, spray and high pressure nozzles the process modules can be configured for a wide variety of applications like photoresist develop, metal lift-off, cleaning or resist stripping. Additional options like temperature control to point-of use, filtration and media recirculation contribute to reduced media consumption and guarantee optimum cost-of ownership control.
Automated Spin Coaters and Spray Coaters
Highly automated, modular wet processing equipment for wafers up to 300mm - 3D-Integration, Wafer Bumping, Wafer Level Packaging, MEMS, Compound Semiconductor.
Gamma (up to 200mm)
ACS200Plus (up to 200mm)
ACS300 Gen2 (up to 300mm)
Manual Wet Processing Equipment
The Delta series offers a variety of wet processes such as spray develop, lift-off or puddle develop. Delta systems are the perfect tool for R&D, universities and start-up companies for MEMS, wafer level packaging, 3D-Integration, compound semiconductor.
Delta 12AQ (up to 300mm)
Delta 12L (up to 300mm)