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Process Equipment Designed for LED Manufacturing
All equipment for this application is also optimized for flexibility and throughput, being outfitted with high-brightness exposure lamphouses and high-speed handling systems. Lithographic exposure tools can be configured with backside or infrared viewing systems, providing the capability to expose after alignment to the frontside, backside or buried features of the wafer. Many systems are completely modular so that their capability and throughput can be expanded in the field, and some tools can even be linked together for maximum throughput, process consistency and operator independence.
The market for LEDs is generally divided between commodity items ($0.10/part for mobile phones), high brightness LEDs ($1/part for automotive backlighting), and ulta-high brightness components ($3/part for architectural illumination) with each market segment having its own specific set of challenges and opportunities. For the commodity LED market, cost is paramount, so the total cost of creating the devices is closely scrutinized. For this market, SUSS MicroTec offers tools which are either manually operated or of simplified configuration for very attractive cost-of-ownership.
For the high- and ultra-high end devices, device performance depends heavily on producing the maximum amount of light from the chip for the lowest cost. Since this performance depends directly on the device fabrication and packaging, SUSS MicroTec tools can incorporate several quality-enhancing options, including a straightforward user interface, hardware and software to optimize the feature size and lithographic overlay, automatic optical filter exchange, a mask library, and even a factory automation package. Factory automation can connect the processing tool directly into the fab’s own computer, ensuring optimum equipment utilization and yield and a minimum mis-processing of material.
To help extract all those photons generated within the device, SUSS MicroTec bonders can assemble the package incorporating mirrors or other optical elements which enhance the final output of the LED by guiding and directing light which would otherwise be wasted as heat. And with all these process types, SUSS MicroTec always provides expert equipment and process support to assist the user in selecting, optimizing and supporting the tool.
