Ownership of Shares and Subscription Rights

As of the end of the third quarter on September 30, 2009 the members of the Management and Supervisory Board of SUSS MicroTec AG own the following number of shares and subscription rights:

Supervisory Board Number of shares on 09/30/2009 Change from 12/31/2008 Number of options on 09/30/2009 Change from 12/31/2008
Dr. Stefan Reineck 9,600 + 3,000 40,000 -
Jan Teichert 0 - 0 -
Sebastian Reppegather* 0 - 0 -
Management Board  
Frank Averdung 27,500 + 27,500 67,500 + 67,500
Michael Knopp 22,500 - 97,500 + 67,500

* Member of the Supervisory Board since June 24, 2009

As of the end of the fiscal year on December 31, 2008, the members of the Management and Supervisory Board of SUSS MicroTec AG own the following number of shares and subscription rights:

Supervisory Board Number of shares on 12/31/2008 Change from 12/31/2007 Number of options on 12/31/2008 Change from 12/31/2007
Dr. Franz Richter* 101,040 +101,040 - -
Dr. Stefan Reineck* 6,600 +5,000 40,000
Jan Teichert* - - - -
Dr. Winfried Süss** - -1,131,000 - -
Gerhard Rauter** - - - -
Peter Heinz** - -1,338 - -
Prof. Dr. Anton Heuberger** - - - -
Heinz-Peter Verspay** - - - -
Management Board  
Michael Knopp 22,500 +17,500 30,000 -
Christian Schubert*** - - - -
Dr. Stefan Schneidewind **** 18,278 - 150,000 -

** Supervisory Board member until June 19, 2008
*** Mangement Board member since October 2, 2008
**** Management Board member until October 2, 2008