Declaration of Compliance with the German Corporate Governance Code in accordance with section 161 of the German Stock Corporation Act (AktG)

Declaration by the Executive Board and Supervisory Board of SÜSS MicroTec AG in accordance with section 161 of the Aktiengesetz (AktG – German Stock Corporation Act):

SÜSS MicroTec AG will comply with the current recommendations of the German Corporate Governance Code in the version dated June 6, 2008 except for the following three exceptions, and complied with the recommendations of the German Corporate Governance Code dated June 14, 2007 except for the two exceptions regarding the deductible in respect of D&O liability insurance and the compensation of the Supervisory Board for the period from December 14, 2007 to November 7, 2008.